High-reflectance 193 nm Al2O3/MgF2 mirrors

被引：8

作者：

Shang, SZ ^{[1
]}

Shao, JD ^{[1
]}

Liao, CY ^{[1
]}

Yi, K ^{[1
]}

Fan, ZX ^{[1
]}

Chen, L ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2005年 / 249卷 / 1-4期

关键词：

optical coatings; 193; nm; HR mirrors; Al2O3; MgF2;

D O I：

10.1016/j.apsusc.2004.11.076

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Thin-film single layers of Al2O3 and MgF2 were deposited upon super polished fused-silica by electron-beam evaporation. The subsequent optical constants n and k were reported for the spectral range of 180-230 nm. High-reflectance dense multilayer coatings for 193 nm were designed on the basis of the evaluated optical constants and produced. The spectra of the reflectance of HR coatings were compared to the theoretical calculations. HR mirrors of 27 layers with a reflectance of more than 98% were reported. (c) 2004 Elsevier B.V. All rights reserved.

引用

页码：157 / 161

页数：5

共 50 条

[1] Effects of annealing on electron-beam evaporated 193nm Al2O3/MgF2 HR mirrors
Shang Shu-Zhen
Shao Jian-Da
Shen Jian
Yi Kui
Fan Zheng-Xiu
ACTA PHYSICA SINICA, 2006, 55 (05) : 2639 - 2643
[2] Study of Al2O3/MgF2 HR coatings at 355 nm
Zhan, MQ
Gao, WD
Tan, TY
He, HB
Shao, JD
Fan, ZX
VACUUM, 2005, 79 (1-2) : 90 - 93
[3] Influence of the number of double layers on the damage threshold of Al2O3/SiO2 and LaF3/MgF2 mirrors at 248nm
Eva, E
Mann, K
Schallenberg, UB
Kaiser, N
Henking, R
Ristau, D
LASER-INDUCED DAMAGE IN OPTICAL MATERIALS: 1995: 27TH ANNUAL BOULDER DAMAGE SYMPOSIUM, PROCEEDINGS, 1996, 2714 : 499 - 510
[4] High-reflectivity mirrors by Al2O3, LaF3 and AlF3 for 193 nm application
Sun, Jian
Li, Xu
Zhang, Weili
Yi, Kui
Shao, Jianda
OPTICS AND LASER TECHNOLOGY, 2014, 56 : 65 - 70
[5] Laser damage properties of Al2O3/MgF2 antireflection coatings on large, curved substrates at 248 nm
Merchant, Nasir
DeLuca, Richard
Gentile, Michael
Kohli, Sandeep
Zadrovicz, Katy Csady
Albrecht, Michael
COMPONENTS AND PACKAGING FOR LASER SYSTEMS VIII, 2022, 11982
[6] Preparation and characteristics of Cu/Al2O3/MgF2/Au tunnel junction
Maoxiang Wang
Wei Yu
Jianhua Yu
Youwen Zhang
Xuping Zhang
Journal of Wuhan University of Technology-Mater. Sci. Ed., 2009, 24 : 721 - 724
[7] Preparation and Characteristics of Cu/Al2O3/MgF2/Au Tunnel Junction
Wang Maoxiang
Yu Wei
Yu Jianhua
Zhang Youwen
Zhang Xuping
JOURNAL OF WUHAN UNIVERSITY OF TECHNOLOGY-MATERIALS SCIENCE EDITION, 2009, 24 (05): : 721 - 724
[8] Preparation and Characteristics of Cu/Al2O3/MgF2/Au Tunnel Junction
王茂祥
Journal of Wuhan University of Technology(Materials Science), 2009, 24 (05) : 721 - 724
[9] THE EFFECT OF PROTECTIVE COATINGS OF MGF2 AND SIO ON THE REFLECTANCE OF ALUMINIZED MIRRORS
BENNETT, HE
BENNETT, JM
ASHLEY, EJ
APPLIED OPTICS, 1963, 2 (02) : 156 - 156
[10] ANISOTROPIC PHONON UMKLAPP SCATTERING IN AL2O3, MNF2 AND MGF2
HUDSON, PRW
JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1976, 9 (01): : 21 - 31

← 1 2 3 4 5 →