LiNbO3 channel and ridge waveguides based on helium ion implantation combined with lithography and precise diamond dicing

被引：11

作者：

Wang, Sumei ^{[1
]}

Zhao, Jinhua ^{[1
]}

Gu, Jinjun ^{[1
]}

Bu, Mingyang ^{[1
]}

Fan, Li ^{[1
]}

Li, Shuang ^{[1
]}

Qin, Xifeng ^{[1
]}

Yao, Yicun ^{[2
]}

Ren, Yingying ^{[3
,4
]}

Wang, Lei ^{[5
]}

机构：

[1] Shandong Jianzhu Univ, Sch Sci, Jinan 250101, Peoples R China

[2] Liaocheng Univ, Sch Phys Sci & Informat Technol, Shandong Key Lab Opt Commun Sci & Technol, Liaocheng 252059, Shandong, Peoples R China

[3] Shandong Normal Univ, Shandong Prov Engn & Tech Ctr Light Manipulat, Jinan 250014, Peoples R China

[4] Shandong Normal Univ, Shandong Prov Key Lab Opt & Photon Device, Sch Phys & Elect, Jinan 250014, Peoples R China

[5] Shandong Univ, Sch Phys, Jinan 250100, Peoples R China

来源：

CHINESE OPTICS LETTERS | 2022年 / 20卷 / 07期

基金：

中国国家自然科学基金;

关键词：

lithium niobate; waveguides; ion implantation; ridge waveguide; channel waveguide; LITHIUM-NIOBATE; DIRECTIONAL COUPLER; COMBINATION;

D O I：

10.3788/COL202220.071301

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Lithium niobate (LiNbO3, LN) channel and ridge waveguides have been successfully fabricated by He ion implantation, which has energy of 500 keV and fluence of 1.5 x 10(16) ions/cm(2) and is combined with lithography and the precise diamond dicing technique. The refractive index profile of the annealed LN planar waveguide was reconstructed. The propagation loss of the channel waveguide with a width of 10 mu m and that of the ridge waveguides with widths of 25 mu m and 15 mu m were investigated by the end-face coupling method. In our work, the factors that affect the waveguide properties of channel and ridge waveguides were revealed.

引用

页数：5

共 26 条

[1] Polarization splitter based on a three waveguide directional coupler using quantum mechanical analogies [J].

Aashna, Pragati ;

Thyagarajan, K. .

JOURNAL OF OPTICS, 2017, 19 (06)

[2] Optical waveguides in crystalline dielectric materials produced by femtosecond- laser micromachining [J].

Chen, Feng ;

Vazquez de Aldana, J. R. .

LASER & PHOTONICS REVIEWS, 2014, 8 (02) :251-275

[3] Silicon grating coupler on a lithium niobate thin film waveguide [J].

Chen, Zhihua ;

Wang, Yiwen ;

Zhang, Honghu ;

Hu, Hui .

OPTICAL MATERIALS EXPRESS, 2018, 8 (05) :1253-1258

[4] Mid-infrared ridge waveguide in MgO:LiNbO3 crystal produced by combination of swift O5+ ion irradiation and precise diamond blade dicing [J].

Cheng, Yazhou ;

Lv, Jinman ;

Akhmadaliev, Shavkat ;

Zhou, Shengqiang ;

Kong, Yongfa ;

Chen, Feng .

OPTICAL MATERIALS, 2015, 48 :209-214

[5] Impact of He and H relative depth distributions on the result of sequential He+ and H+ ion implantation and annealing in silicon [J].

Cherkashin, N. ;

Daghbouj, N. ;

Seine, G. ;

Claverie, A. .

JOURNAL OF APPLIED PHYSICS, 2018, 123 (16)

[6] Extraordinary refractive-index increase in lithium niobate caused by low-dose ion implantation [J].

Hu, H ;

Lu, F ;

Chen, F ;

Shi, BR ;

Wang, KM ;

Shen, DY .

APPLIED OPTICS, 2001, 40 (22) :3759-3761

[7] Recent Progress in Lithium Niobate: Optical Damage, Defect Simulation, and On-Chip Devices [J].

Kong, Yongfa ;

Bo, Fang ;

Wang, Weiwei ;

Zheng, Dahuai ;

Liu, Hongde ;

Zhang, Guoquan ;

Rupp, Romano ;

Xu, Jingjun .

ADVANCED MATERIALS, 2020, 32 (03)

[8] Ultra-low loss photonic circuits in lithium niobate on insulator [J].

Krasnokutska, Inna ;

Tambasco, Jean-Luc J. ;

Li, Xijun ;

Peruzzo, Alberto .

OPTICS EXPRESS, 2018, 26 (02) :887-894

[9] Advances in on-chip photonic devices based on lithium niobate on insulator [J].

Lin, Jintian ;

Bo, Fang ;

Cheng, Ya ;

Xu, Jingjun .

PHOTONICS RESEARCH, 2020, 8 (12) :1910-1936

[10] A ridge waveguide constructed by H+ implantation and precise diamond blade dicing in high-gain Nd3+-doped laser glass [J].

Liu, Chun-Xiao ;

You, Jia-Li ;

Lin, Shuo-Qi ;

Chen, Jing-Yi ;

Tang, Min ;

Lin, She-Bao ;

Zheng, Rui-Lin ;

Fu, Li-Li ;

Zhang, Liao-Lin .

OPTIK, 2021, 225

← 1 2 3 →