Experimental Study on Load Characteristics of Macro-Micro Dual-Drive Precision Positioning Mechanism

This paper presents a macro-micro two-stage parallel experimental platform. The 3RRR macro planar parallel mechanism driven by the YASWAKA Sigma-V series motor is to ensure the system's large workspace. The 3RRR micro parallel mechanism based on compliant mechanism is driven by the pack-aged piezoelectric ceramics actuators (PPCA) which effectively guarantee the precision and accuracy of nanoscale positioning. In fact, the load characteristic is a basic index that affects the performance of the macro/micro combination mechanism. A displacement experiment is designed for the macro parallel mechanism to move in a straight line under different loads. The displacement is measured by the Renishaw laser interferometer. It is proved by the experiment that the precision and stability can be affected under different loads. The load characteristics research results and analysis in this paper are significant to the optimal design of a macro-micro dual-drive precision positioning planar parallel mechanisms for different applications.