Modelling and optimization of single drive 3-axis MEMS gyroscope

被引：8

作者：

Din, Hussamud ^{[1
]}

Iqbal, Faisal ^{[2
]}

Lee, Byeungleul ^{[1
]}

机构：

[1] Korea Univ Technol & Educ, Sch Mechatron Engn, Cheonan, South Korea

[2] Korea Univ Technol & Educ, Interdisciplinary Program Creat Engn, Cheonan, South Korea

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2020年 / 26卷 / 09期

关键词：

Structural design - Electromechanical devices - MEMS - Natural frequencies;

D O I：

10.1007/s00542-020-04840-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a design optimization approach for a single-drive, 3-axis Microelectromechanical Systems (MEMS) gyroscope. Mathematical models for springs are obtained and a simplified structure for single-drive, 3-axis MEMS gyroscope is proposed. In the proposed structure, concentrated spring architecture was exploited to critical mechanical elements in order to mitigate the fabrication imperfections in the design and the effect of unwanted frequencies. The number of elastic elements was also reduced, while increasing the active area efficiently. The proposed simplified, singledrive, 3-axis MEMS gyroscope is using mode split approach, having a drive resonant frequency of 25443Hz; with the x sense; y sense; and z sense being 25529Hz, 25612Hz, and 25621Hz; respectively. The drive and desired sense resonant frequencies are separated by a frequency difference of less than 300Hz, while the unwanted ones are above 3kHz.

引用

页码：2869 / 2877

页数：9

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