Fast AlGaN metal-semiconductor-metal photodetectors grown on Si(111)

被引:7
|
作者
Pau, JL [1 ]
Monroy, E [1 ]
Muñoz, E [1 ]
Calle, F [1 ]
Sánchez-Garcia, MA [1 ]
Calleja, E [1 ]
机构
[1] Univ Politecn Madrid, ETSI Telecomunicac, Dept Ingn Elect, E-28040 Madrid, Spain
关键词
D O I
10.1049/el:20010146
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Metal-semiconductor-metal photodetectors have been fabricated on AlGaN grown on Si(111) by molecular beam epitaxy for solar- blind applications. A cutoff wavelength of 290nm and an ultraviolet/visible contrast of more than three orders of magnitude are achieved. Time response measurements show fast exponential decays, with a minimum decay time or 150ns. The photodetectors present responsivities that increase with bias, reaching 15mA/W at 4V bias.
引用
收藏
页码:239 / 240
页数:2
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