Design, fabrication and optical characterization of GaAs photonic crystal nanocavity lasers with InAs quantum dots gain wafer-bonded onto Si substrates

被引:0
作者
Tanabe, Katsuaki [1 ]
Nomura, Masahiro [1 ]
Guimard, Denis [1 ,2 ]
Iwamoto, Satoshi [1 ,2 ]
Arakawa, Yasuhiko [1 ,2 ]
机构
[1] Univ Tokyo, Inst Nano Quantum Informat Elect, Meguro Ku, Tokyo 1538505, Japan
[2] Univ Tokyo, Inst Ind Sci, Meguro Ku, Tokyo 1538505, Japan
关键词
Photonic crystal; Nanocavity laser; Quantum dot; Silicon photonics; CONTINUOUS-WAVE OPERATION; SILICON-WAFER; INP;
D O I
10.1016/j.physe.2010.03.011
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We designed and fabricated III-V compound semiconductor two-dimensional photonic crystal (PhC) thin film slabs with quantum dots (QDs) inside formed on Si substrates for highly integrated silicon photonic circuits with built-in nanolasers. Defect-shifted L3 type PhC nanocavities formed in GaAs thin films embedding 1.3 mu m-emitting InAs QDs layer-transferred onto Si substrates were investigated. Quality factors < 1000 for the PhC nanocavities on SiO(2) were enhanced up to similar to 8000 by removing SiO(2) to form air-bridge structures, resulting in room temperature, continuous wave lasing. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:2560 / 2562
页数:3
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