共 50 条
- [42] Atomic layer deposition of PbZrO3 thin films APPLIED SURFACE SCIENCE, 2007, 253 (12) : 5228 - 5232
- [45] X-ray absorption spectroscopy study of Yb2O3 and Lu2O3 thin films deposited on Si(100) by atomic layer deposition NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2006, 246 (01): : 90 - 95