Broadband iridium wire grid polarizer for UV applications

被引:59
作者
Weber, Thomas [1 ]
Kaesebier, Thomas [1 ]
Kley, Ernst-Bernhard [1 ]
Tuennermann, Andreas [1 ,2 ]
机构
[1] Univ Jena, Inst Angew Phys, D-07743 Jena, Germany
[2] Fraunhofer Inst Angew Opt & Feinmech, D-07745 Jena, Germany
关键词
D O I
10.1364/OL.36.000445
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
In this Letter, we present an iridium wire grid polarizer with a large spectral working range from IR down to the UV spectral region. The required grating period of 100 nm for an application below a wavelength of 300 nm was realized using a spatial frequency doubling technique based on ultrafast electron beam writing. The optical performance of the polarizer at a wavelength of 300 nm is a transmittance of almost 60% and an extinction ratio of about 30 (15 dB). Furthermore, the oxidation resistance is discussed. (C) 2011 Optical Society of America
引用
收藏
页码:445 / 447
页数:3
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