Cascaded micromirror pair driven by angular vertical combs for two-axis scanning

被引：1

作者：

Fujino, M ^{[1
]}

Patterson, PR ^{[1
]}

Nguyen, H ^{[1
]}

Piyawattanametha, W ^{[1
]}

Wu, MC ^{[1
]}

机构：

[1] Univ Calif Los Angeles, Dept Elect Engn, Los Angeles, CA 90024 USA

来源：

2003 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS | 2003年

关键词：

D O I：

10.1109/OMEMS.2003.1233486

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Monolithically cascaded one-axis micromirrors driven by angular vertical combs are designed and fabricated. Using "W"-shape ray optics, we demonstrate two-axis scanning covering +/-6.0degrees two-dimensional area at resonant modes: 7.5kHz, +/-17V in fast-scanning mirror, 1.2kHz, +/-7V in slow-scanning mirror.

引用

页码：99 / 100

页数：2