A novel adaptive phase-shifting interferometry

被引:0
作者
Zhao, WR [1 ]
Cao, GR [1 ]
Ma, JQ [1 ]
机构
[1] Beijing Inst Technol, Dept Opt Engn, Beijing 100081, Peoples R China
来源
ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGY 2000 | 2000年 / 4231卷
关键词
adaptive interferometry; acousto-optic modulation; vibration compensation; closed feedback control;
D O I
10.1117/12.402828
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An adaptive phase-shifting interferometry, insensitive to the disturbance of constant term of phase perturbations induced by environmental vibration and air turbulence is introduced. Where high frequency intensity modulation of laser beam and phase lock-in as well as the closed loop control techniques are used. The wobble of interference fringes can be compensated, and sequentially be locked at arbitrarily chosen phases for phase-shifting testing. Comparing with other similar techniques, here the depth of signal modulation is not limited by the magnitude of optical path difference (OPD) and the fringe contrast is not reduced by the modulation, hence a high SNR can be obtained. The experimental results and conclusions are presented.
引用
收藏
页码:360 / 364
页数:5
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