SELF-HEATING CMOS FLOW SENSOR

被引：0

作者：

Waikhom, Reshmi ^{[1
]}

Yang, Lung-Jieh ^{[1
]}

Shih, Horng-Yuan ^{[1
]}

Kuo, Cai-Rong ^{[1
]}

机构：

[1] Tamkang Univ, New Taipei, Taiwan

来源：

2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2021年

关键词：

UMC CMOS foundry; 0.18 mu m; flow sensor; self-heating; SINGLE-CHIP;

D O I：

10.1109/TRANSDUCERS50396.2021.9495463

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a new design of polysilicon flow sensor fabricated by UMC 0.18 mu m CMOS MEMS foundry. Our self-heating design is different from the conventional one which has floating plate with resistive temperature detectors (RTDs) heated by another heater aside, and our self-heating RTD half-bridge is only 300 x 250 mu m(2) in chip size. This new design outputs a normalized sensitivity of 138 mu V/V/(m/s) within the speed range of 0-15 m/s. This sensitivity is 89% of Y.-K. Lee's work in IEEE MEMS 2020. The dummy specimen and the orientation-free wind tunnel tests also confirmed the sensor performance.

引用

页码：1279 / 1282

页数：4

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