Fabrication of spiral-phase diffractive elements using scanning-electron-beam lithography

被引：22

作者：

Tsai, Hsin-Yu ^{[1
]}

Smith, Henry I. ^{[1
]}

Menon, Rajesh ^{[2
,3
]}

机构：

[1] MIT, Dept Elect & Comp Sci, Cambridge, MA 02139 USA

[2] MIT, Elect Res Lab, Cambridge, MA 02139 USA

[3] LumArray Inc, Somerville, MA 02143 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2007年 / 25卷 / 06期

关键词：

D O I：

10.1116/1.2806961

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The authors report on the fabrication of binary spiral zone plates and investigate an approach using gray scale scanning-electron-beam lithography to fabricate spiral-phase plates. The optical performance of the spiral zone plates is characterized via photoresist exposures and compared to theory. (c) 2007 American Vacuum Society.

引用

收藏

页码：2068 / 2071

页数：4

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