Ultra thin high index contrast photonic crystal slabs in lithium niobate

被引:26
作者
Hartung, Holger [1 ]
Kley, Ernst-Bernhard [1 ]
Gischkat, Thomas [2 ]
Schrempel, Frank [2 ]
Wesch, Werner [2 ]
Tuennermann, Andreas [1 ]
机构
[1] Univ Jena, Inst Appl Phys, D-07743 Jena, Germany
[2] Univ Jena, Inst Solid State Phys, D-07743 Jena, Germany
关键词
Lithium niobat; Ion irradiation; Photonic crystal; Fabrication; RIDGE WAVE-GUIDES; FABRICATION; LINBO3; FILMS;
D O I
10.1016/j.optmat.2010.07.012
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We present for the first time the realization of a free standing photonic crystal slab with a thickness of 450 nm in lithium niobate. The air slot underneath the membrane as well as the air holes, constituting the photonic crystal therein, are realized by the application of ion beam enhanced etching onto bulk lithium niobate. The index difference of 1.2 and the small membrane thickness allow for a very strong vertical confinement of the light and a single mode waveguide behavior (lambda = 1550 nm) at the same time. A photonic crystal structure in a 5 mm long membrane, suspended in air, is shown. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:19 / 21
页数:3
相关论文
共 15 条
[1]   Wet-etched ridge waveguides in Y-cut lithium niobate [J].
Cheng, RS ;
Wang, TJ ;
Wang, WS .
JOURNAL OF LIGHTWAVE TECHNOLOGY, 1997, 15 (10) :1880-1887
[2]   Surface nanoscale periodic structures in congruent lithium niobate by domain reversal patterning and differential etching [J].
Grilli, S ;
Ferraro, P ;
De Natale, P ;
Tiribilli, B ;
Vassalli, M .
APPLIED PHYSICS LETTERS, 2005, 87 (23) :1-3
[3]   Fabrication of ridge waveguides in zinc-substituted lithium niobate by means of ion-beam enhanced etching [J].
Hartung, Holger ;
Kley, Ernst-Berhard ;
Tuennermann, Andreas ;
Gischkat, Thomas ;
Schrempel, Frank ;
Wesch, Werner .
OPTICS LETTERS, 2008, 33 (20) :2320-2322
[4]   Patterning of wave guides in LiNbO3 using ion beam etching and reactive ion beam etching [J].
Hines, DS ;
Williams, KE .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2002, 20 (03) :1072-1075
[5]   Slow-light enhanced collinear second-harmonic generation in two-dimensional photonic crystals [J].
Iliew, Rumen ;
Etrich, Christoph ;
Pertsch, Thomas ;
Lederer, Falk .
PHYSICAL REVIEW B, 2008, 77 (11)
[6]   MICROFABRICATION IN LINBO3 BY ION-BOMBARDMENT-ENHANCED ETCHING [J].
KAWABE, M ;
KUBOTA, M ;
MASUDA, K ;
NAMBA, S .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (03) :1096-1098
[7]   Nanostructuring lithium niobate substrates by focused ion beam milling [J].
Lacour, F ;
Courjal, N ;
Bernal, MP ;
Sabac, A ;
Bainier, C ;
Spajer, M .
OPTICAL MATERIALS, 2005, 27 (08) :1421-1425
[8]   Fabrication of single-crystal lithium niobate films by crystal ion slicing [J].
Levy, M ;
Osgood, RM ;
Liu, R ;
Cross, LE ;
Cargill, GS ;
Kumar, A ;
Bakhru, H .
APPLIED PHYSICS LETTERS, 1998, 73 (16) :2293-2295
[9]   Etching characteristics of LiNbO3 in reactive ion etching and inductively coupled plasma [J].
Ren, Z. ;
Heard, P. J. ;
Marshall, J. M. ;
Thomas, P. A. ;
Yu, S. .
JOURNAL OF APPLIED PHYSICS, 2008, 103 (03)
[10]  
SCHREMPEL F, 2006, MAT RES SOC S P E, V908