Several aspects of the return flows formation in horizontal CVD reactors

被引:10
作者
Makhviladze, TM [1 ]
Martjushenko, AV [1 ]
机构
[1] SOFT TEC, Inst Phys & Technol, Moscow 117218, Russia
关键词
D O I
10.1016/S0017-9310(97)00188-9
中图分类号
O414.1 [热力学];
学科分类号
摘要
An explanation of the return flow onset behavior in a long horizontal CVD reactor is proposed on the basis of combined; analytical and numerical approach. This approach allows one to obtain the condition of vortex onset in the form, that includes not only Grashof and Reynolds numbers, but also the temperature difference at the reactor top and bottom walls. Also some three-dimensional effects are investigated, which accompany the return flow formation in a horizontal CVD reactor. (C) 1998 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:2529 / 2536
页数:8
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