Virtual rough samples to test 3D nanometer-scale scanning electron microscopy stereo photogrammetry

被引：9
作者：
Villarrubia, J. S. [1 ]
Tondare, V. N. [1 ]
Vladar, A. E. [1 ]
机构：
[1] Natl Inst Stand & Technol, Div Engn Phys, Phys Measurements Lab, Gaithersburg, MD 20899 USA
来源：
METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXX | 2016年 / 9778卷
关键词：
critical dimension (CD); dimensional metrology; model-based metrology; scanning electron microscopy (SEM); simulation; stereo photogrammetry; surface roughness; virtual sample; SURFACES; SPECTRUM; LIBRARY; WIDTH; MODEL;
D O I：
10.1117/12.2219777
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The combination of scanning electron microscopy for high spatial resolution, images from multiple angles to provide 3D information, and commercially available stereo photogrammetry software for 3D reconstruction offers promise for nanometer-scale dimensional metrology in 3D. A method is described to test 3D photogrammetry software by the use of virtual samples-mathematical samples from which simulated images are made for use as inputs to the software under test. The virtual sample is constructed by wrapping a rough skin with any desired power spectral density around a smooth near-trapezoidal line with rounded top corners. Reconstruction is performed with images simulated from different angular viewpoints. The software's reconstructed 3D model is then compared to the known geometry of the virtual sample. Three commercial photogrammetry software packages were tested. Two of them produced results for line height and width that were within close to 1 nm of the correct values. All of the packages exhibited some difficulty in reconstructing details of the surface roughness.
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页数：9
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