Ge-Based Asymmetric RRAM Enable 8F2 Content Addressable Memory

被引:24
作者
Chen, Bing [1 ]
Zhang, Yi [1 ]
Liu, Wei [1 ]
Xu, Shun [1 ]
Cheng, Ran [1 ]
Zhang, Rui [1 ]
Zhao, Yi [1 ,2 ]
机构
[1] Zhejiang Univ, Coll Elect Engn & Informat Sci, Hangzhou 310027, Zhejiang, Peoples R China
[2] Zhejiang Univ, State Key Lab Silicon Mat, Hangzhou 310027, Zhejiang, Peoples R China
关键词
Content addressable memory (CAM); RRAM; Ge; nonvolatile; integration density; DESIGN; CAM;
D O I
10.1109/LED.2018.2856537
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, we developed an asymmetric Ge-based RRAM using a fully CMOS compatible process. Due to the adoption of a thin AlOx/GeOx interfacial layer, the TiN/HfOx/AlOx/GeOx/Ge structured RRAM shows both excellent switching behavior and diodelike rectifying characteristics. Based on the asymmetric RRAM device, a high density nonvolatile content addressable memory was proposed and demonstrated, and its function was verified by experimental measurements. This novel two-asymmetric RRAM-based TCAM cell with only 8F(2) size is very promising for future energy and area-efficient IoT and Internet applications.
引用
收藏
页码:1294 / 1297
页数:4
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