High-Speed Focus Inspection System Using a Position-Sensitive Detector

被引:11
作者
Cao, Binh Xuan [1 ,2 ]
Le Hoang, Phuong [3 ]
Ahn, Sanghoon [1 ]
Kang, Heeshin [1 ]
Kim, Jengo [1 ]
Noh, Jiwhan [1 ,2 ]
机构
[1] KIMM, Dept Laser & Electron Beam Applicat, Daejeon 34103, South Korea
[2] Korea Univ Sci & Technol UST, Dept Nanomechatron, Daejeon 34113, South Korea
[3] Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Daejeon 34141, South Korea
关键词
focal position detection; laser micromachining; CCD camera; single-slit masks; position-sensitive detector; AUTOFOCUSING MICROSCOPE; DESIGN;
D O I
10.3390/s17122842
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Precise and rapid focus detection is an essential operation in several manufacturing processes employing high-intensity lasers. However, the detection resolution of existing methods is notably low. This paper proposes a technique that provides a rapid-response, high-precision, and high-resolution focus inspection system on the basis of geometrical optics and advanced optical instruments. An ultrafast interface position detector and a single-slit mask are used in the system to precisely signal the focus position with high resolution. The reflected images on the image sensor are of a high quality, and this quality is maintained persistently when the target surface is shifted along the optical axis. The proposed system developed for focus inspection is simple and inexpensive, and is appropriate for practical use in the industrial production of sophisticated structures such as microcircuits and microchips.
引用
收藏
页数:11
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共 21 条
  • [1] Error-based autofocus system using image feedback in a liquid-filled diaphragm lens
    Abdullah, Soran J.
    Ratnam, Mani Maran
    Samad, Zahurin
    [J]. OPTICAL ENGINEERING, 2009, 48 (12)
  • [2] In-Situ Real-Time Focus Detection during Laser Processing Using Double-Hole Masks and Advanced Image Sensor Software
    Binh Xuan Cao
    Phuong Le Hoang
    Ahn, Sanghoon
    Kim, Jeng-o
    Kang, Heeshin
    Noh, Jiwhan
    [J]. SENSORS, 2017, 17 (07):
  • [3] High-precision detection of focal position on a curved surface for laser processing
    Cao, Binh Xuan
    Phuong Le Hoang
    Ahn, Sanghoon
    Kim, Jeng-o
    Noh, Jiwhan
    [J]. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2017, 50 : 204 - 210
  • [4] Development of a low-cost autofocusing probe for profile measurement
    Fan, KC
    Chu, CL
    Mou, JI
    [J]. MEASUREMENT SCIENCE AND TECHNOLOGY, 2001, 12 (12) : 2137 - 2146
  • [5] Hamamatsu, 1 D PSD SMALL PLAST
  • [6] Autofocusing method using fluorescence detection for precise two-photon nanofabrication
    Jung, Byung Je
    Kong, Hong Jin
    Jeon, Byoung Goo
    Yang, Dong-Yol
    Son, Yong
    Lee, Kwang-Sup
    [J]. OPTICS EXPRESS, 2011, 19 (23): : 22659 - 22668
  • [7] Autofocusing in optical scanning holography
    Kim, Taegeun
    Poon, Ting-Chung
    [J]. APPLIED OPTICS, 2009, 48 (34) : H153 - H159
  • [8] Development of an auto-focus system based on the moire method
    Lee, Ju-Yi
    Wang, Yung-Hsing
    Lai, Lyu-Jhen
    Lin, Yu-Ju
    Chang, Yu-Hsiu
    [J]. MEASUREMENT, 2011, 44 (10) : 1793 - 1800
  • [9] Autofocus system for space cameras
    Li, ZH
    Wu, KY
    [J]. OPTICAL ENGINEERING, 2005, 44 (05) : 1 - 5
  • [10] Design and characterization of high-performance autofocusing microscope with zoom in/out functions
    Liu, Chien-Sheng
    Wang, Ze-Yan
    Chang, Yu-Ching
    [J]. APPLIED PHYSICS B-LASERS AND OPTICS, 2015, 121 (01): : 69 - 80