Physical surface effects of Ti:LiNbO3 diffusion

Titanium [Ti] diffusion into lithium niobate (LiNbO3) is often used to define waveguides for integrated optics devices which are now of considerable commercial importance. I report here on changes in the surface shape caused by titanium diffusion for fabricating [LiNbO3] integrated optical devices. I found that the processing leaves surface ridges whose height and shape depend on mass flow of lithium niobate, thickness of titanium, hydrogen content of diffusion atmosphere, and time at temperature. I also describe the surface effects of a reaction between LiNbO3 and quartz (silicon). To my knowledge the effects reported here have never before been reported in the open literature.