Room temperature magnetic properties of Fe and C implanted ZnO films

被引:8
作者
Xue, Y. H.
Zhang, X. D.
Zhang, X. L.
Shen, Y. Y.
Zhu, F.
Zhang, L. H.
Wang, J.
Liu, C. L. [1 ,2 ]
机构
[1] Tianjin Univ, Dept Appl Phys, Sch Sci, Tianjin 300072, Peoples R China
[2] Fac Sci, Tianjin Key Lab Low Dimens Mat Phys & Preparing T, Inst Adv Mat Phys, Tianjin 300072, Peoples R China
关键词
ZnO thin film; Ion-implantation; Optical properties; Room-temperature magnetism; FERROMAGNETISM; FABRICATION;
D O I
10.1016/j.apsusc.2011.06.053
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
ZnO films prepared by radio frequency magnetron sputtering were singly or sequentially implanted with 120 keV Fe ions at a fluence of 5 x 10(16) ions/cm(2) and 20 keV C ions at a fluence of 3 x 10(15) ions/cm(2). Magnetic and optical properties as well as structures of the films have been investigated using various techniques. Magnetic measurements show that the as-deposited ZnO film presents room temperature ferromagnetism. Single Fe or C ion implantation has no contribution to enhancement in the film magnetism, while magnetic moment increases distinctly in the Fe and C ions sequentially implanted film. Results from structural measurements reveal that Fe nanoparticles are formed in the Fe singly implanted ZnO film. The post C implantation induces dissolution of Fe nanoparticles and promotes Fe atoms to substitute Zn atoms in the lattice. Based on the structural results, the effect of magnetic enhancement has been tentatively interpreted. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:10329 / 10332
页数:4
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