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Numerical analysis of silicon-on-insulator ridge nanowires by using a full-vectorial finite difference method mode solver
被引:20
作者:
Dai, Daoxin
[1
]
Sheng, Zhen
机构:
[1] Zhejiang Univ, Ctr Opt & Electromagnet Res, State Key Lab Modern Opt Instrument, Hangzhou 310058, Peoples R China
[2] Zhejiang Univ, Hangzhou 310058, Peoples R China
关键词:
D O I:
10.1364/JOSAB.24.002853
中图分类号:
O43 [光学];
学科分类号:
070207 ;
0803 ;
摘要:
The characteristics of silicon-on-insulator (SOD ridge waveguides are analyzed by using a cylindrical fall-vectorial finite-difference method mode solver with a perfectly-matched layer treatment. First, the single-mode condition for an SOI ridge nanowire with different Si core thicknesses is obtained. The obtained single-mode condition is different from that for the conventional micrometrical SOI ridge waveguides with a large cross section. By adjusting the cross section (the core width and the etching depth), one can have a nonbirefringent SOI ridge nanowire. The analysis on the bending loss of SOI ridge nanowires shows that one can have a relatively small bending radius even with a shallow etching (i.e., a small ratio gamma between the etching depth and the total thickness). For example, even when one chooses a small ratio gamma=0.4, one still has a low bending loss with "small bending radius of 15 mu m for an SOI nanowire with a thin core h(co)= 250 nm, which is very different from a conventional large SOI ridge waveguide. (c) 2007 Optical Society of America
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页码:2853 / 2859
页数:7
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