Ultrathin, ultrasmooth, and low-loss silver films via wetting and annealing

被引:49
作者
Chen, W. [1 ,2 ]
Chen, K. P. [1 ,2 ]
Thoreson, M. D. [3 ]
Kildishev, A. V. [1 ,2 ]
Shalaev, V. M. [1 ,2 ]
机构
[1] Purdue Univ, Birck Nanotechnol Ctr, W Lafayette, IN 47907 USA
[2] Purdue Univ, Sch Elect & Comp Engn, W Lafayette, IN 47907 USA
[3] Univ Erlangen Nurnberg, Erlangen Grad Sch Adv Opt Technol SAOT, D-91052 Erlangen, Germany
关键词
METAMATERIALS; METALS; LAYER;
D O I
10.1063/1.3514257
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have demonstrated that a thermal annealing treatment can reduce the optical losses in ultrathin, ultrasmooth, silver films deposited on a Ge wetting layer to values as low as the bulk material value and at the same time maintain an ultrasmooth surface. The annealing effect is sensitive to the annealing temperature and time, both of which should be carefully controlled. This annealing treatment is also effective for Ag-SiO2 multilayer composite films. (C) 2010 American Institute of Physics. [doi:10.1063/1.3514257]
引用
收藏
页数:3
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