Unified Quantum and Reliability Model for Ultra-Thin Double-Gate MOSFETs

被引:4
|
作者
ElKashlan, Rana Y. [1 ,2 ]
Samy, Omnia [2 ]
Anis, Azza [3 ]
Ismail, Yehea [2 ]
Abdelhamid, Hamdy [2 ]
机构
[1] Misr Int Univ, Elect & Commun Dept, Cairo, Egypt
[2] Zewail City Sci & Technol, CND, Ahmed Zewail Rd, Giza 12578, Egypt
[3] Helwan Univ, Fac Engn, Elect Commun & Comp Dept, Cairo 11795, Egypt
关键词
Double-gate FETs; Quantum confinement; Semiconductor device reliability; Semiconductor device modeling; COMPACT MODEL; CHANNEL; NBTI; IMPACT;
D O I
10.1007/s12633-019-0096-1
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
This paper presents a unified two-dimensional (2D) threshold voltage model for lightly doped symmetrical double-gate p-channel MOSFETs including quantum confinement effects and negative bias temperature instability (NBTI). The proposed model has been derived by solving the two-dimensional Poisson equation to obtain the NBTI potential model and the one-dimensional Schrodinger equation together with the 2D Poisson equation to obtain the quantum confinement model. The quantum expression was subsequently embedded in the NBTI solution to reach a unified model for both quantum confinement and NBTI. The model is simple and continuous, thereby ensuring compatibility for insertion in Verilog-A based device simulators. The effect of stress time on the degradation of the threshold voltage has been measured over a 10 year period. The accuracy of the model has been validated through comparisons with both 2D numerical simulations and experimental data. The results show matching within +/- 3% for channel lengths down to 7 nm and silicon thicknesses of 5 nm at 1 GHz operation after 10 years.
引用
收藏
页码:21 / 28
页数:8
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