Radiation damage in diamonds subjected to helium implantation

被引:38
作者
Khomich, A. V.
Khmelnitskiy, R. A.
Dravin, V. A.
Gippius, A. A.
Zavedeev, E. V.
Vlasov, I. I.
机构
[1] Russian Acad Sci, Fryazino Branch, Inst Radio Engn & Elect, Fryazino 141190, Moscow Oblast, Russia
[2] Russian Acad Sci, PN Lebedev Phys Inst, Moscow 119991, Russia
[3] Russian Acad Sci, Prokhorov Gen Phys Inst, Moscow 119991, Russia
基金
俄罗斯基础研究基金会;
关键词
D O I
10.1134/S1063783407090107
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Optical spectroscopy and volume "swelling" measurements were used to study radiation damage and graphitization of diamonds implanted with helium ions at temperatures from 77 to 373 K. It is established that the radiation damage decreases as the implantation temperature increases. This effect is explained by radiation-stimulated annealing of defects caused by damaging. It is shown that the result of formation of a graphitized layer is determined not by the implantation dose but by the level of radiation damage. It is found that the lower the implantation temperature, the lower the annealing temperatures required for the formation of a graphitized layer. It is shown that annealing of radiation defects and the formation of a graphitized layer in a diamond occur up to 1600 degrees C.
引用
收藏
页码:1661 / 1665
页数:5
相关论文
共 20 条
[1]   VACANCY-RELATED CENTERS IN DIAMOND [J].
DAVIES, G ;
LAWSON, SC ;
COLLINS, AT ;
MAINWOOD, A ;
SHARP, SJ .
PHYSICAL REVIEW B, 1992, 46 (20) :13157-13170
[2]  
Dresselhaus M.S., 1992, ION IMPLANTATION DIA, V1
[3]  
FEDOSEEV DF, 1981, DIAMOND HDB
[4]   RAMAN-SCATTERING FROM MEV-ION IMPLANTED DIAMOND [J].
HUNN, JD ;
WITHROW, SP ;
WHITE, CW ;
HEMBREE, DM .
PHYSICAL REVIEW B, 1995, 52 (11) :8106-8111
[5]   The nature of damage in ion-implanted and annealed diamond [J].
Kalish, R ;
Reznik, A ;
Nugent, KW ;
Prawer, S .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1999, 148 (1-4) :626-633
[6]  
Khmelnitskiy R. A., 1996, Journal of Chemical Vapor Deposition, V5, P121
[7]   Spectroscopic ellipsometry study of buried graphitized layers in the ion-implanted diamond [J].
Khomich, AV ;
Kovalev, VI ;
Zavedeev, EV ;
Khmelnitskiy, RA ;
Gippius, AA .
VACUUM, 2005, 78 (2-4) :583-587
[8]   Recovery of diamond after irradiation at high energy and annealing [J].
Lai, PF ;
Prawer, S ;
Bursill, LA .
DIAMOND AND RELATED MATERIALS, 2001, 10 (01) :82-86
[9]   Recombination-enhanced diffusion of self-interstitial atoms and vacancy-interstitial recombination in diamond [J].
Newton, ME ;
Campbell, BA ;
Twitchen, DJ ;
Baker, JM ;
Anthony, TR .
DIAMOND AND RELATED MATERIALS, 2002, 11 (3-6) :618-622
[10]   Raman investigation of damage caused by deep ion implantation in diamond [J].
Orwa, JO ;
Nugent, KW ;
Jamieson, DN ;
Prawer, S .
PHYSICAL REVIEW B, 2000, 62 (09) :5461-5472