High-energy metal ion implantation for reduction of surface resistivity of alumina ceramic

被引：8

作者：

Gushenets, V. I. ^{[1
]}

Nikolaev, A. G. ^{[1
]}

Oks, E. M. ^{[1
]}

Savkin, K. P. ^{[1
]}

Yushkov, G. Yu. ^{[1
]}

Brown, I. G. ^{[2
]}

机构：

[1] Inst High Current Elect SB RAS, Tomsk, Russia

[2] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Berkeley, CA 94720 USA

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2012年 / 83卷 / 02期

基金：

俄罗斯基础研究基金会;

关键词：

INSULATORS;

D O I：

10.1063/1.3670599

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In this work, the possibility to increase the surface conductivity of ceramic insulators through their treatment with accelerated metal ion beams produced by a MevvaV.Ru vacuum arc source is demonstrated. The increase in surface conductivity is made possible due to experimental conditions in which an insulated collector is charged by beam ions to a potential many times lower than the accelerating voltage, and hence, than the average beam ion energy. The observed effect of charge neutralization of the accelerated ion beam is presumably associated with electrons knocked out of the electrodes of the accelerating system of the source and of the walls of the vacuum chamber by the accelerated ions. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3670599]

引用

页数：3

共 5 条

[1]

Brown G., 2006, P 8 INT C MOD MAT PA, P55

[2]

Kabyshev A.V., 2008, P 9 INT C MOD MAT PA, P356

[3] Optimizing the performance of flat-surface, high-gradient vacuum insulators [J].