Growth of carbon nanotubes on transition metal alloys by microwave-enhanced hot-filament deposition

被引:24
作者
Miao, HY
Lue, JT [1 ]
Chen, SY
Chen, SK
Ouyang, MS
机构
[1] Natl Tsing Hua Univ, Dept Phys, Hsinchu 30013, Taiwan
[2] Natl Tsing Hua Univ, Dept Engn & Syst Sci, Hsinchu 30013, Taiwan
[3] Natl Tsing Hua Univ, Dept Elect Engn, Hsinchu 30013, Taiwan
[4] Natl Tsing Hua Univ, Ctr Mat Sci, Hsinchu 30013, Taiwan
关键词
carbon nanotubes; alloy substrates; hot-filament; radio frequency field;
D O I
10.1016/j.tsf.2005.02.001
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Carbon nanotubes (CNTs) are successfully grown on alloy substrates made of copper and iron groups by hot-filament chemical vapor deposition method with self-bias induced by a radio-frequency-field. A precursor of the hydrogen etching of alloys to produce catalyst nanoparticles on the substrate surface is crucial to CNT growth. Successful CNT growth on bulk-catalyst alloy substrates such as Cu-Ni, Cu-Fe, Cu-Co, and Cu-Ni-Fe-Co illustrates a new base-growth mechanism, which is unlike the tip-growth mechanism in that eutectic nanoparticles dissolve carbons and then precipitate graphite near the contact surface between the particle and the substrate. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:58 / 63
页数:6
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