Hydrogen Permeation through Diamond-Like Carbon Thin Films Coated on PET Sheet

被引：5
|
作者：
Hatta, Akimitsu [1 ]
Kaneko, Shikou [1 ]
Hassan, Md. Kamrul [1 ]
机构：
[1] Kochi Univ Technol, Dept Elect & Photon Syst Engn, Kami City, Kochi 7828502, Japan
来源：
PLASMA PROCESSES AND POLYMERS | 2007年 / 4卷
关键词：
diamond-like carbon (DLC); gas diffusion; gas permeation; plasma-enhanced chemical vapor deposition (PECVD); poly(ethylene terephthalate) (PET);
D O I：
10.1002/ppap.200730709
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Hydrogen (H(2)) permeation through diamond-like carbon (DLC) thin films has been investigated by using dynamic observation of H(2) leakage through the DLC films into a high vacuum chamber equipped with a quadropole mass spectrometer (QMS). DLC films were deposited on polyethylene terephthalate (PET) sheets using radio frequency (RF) plasma chemical vapor deposition (CVD) method from C(2)H(2) source gas. The specimen was set on the flange of an ultra-high vacuum (UHV) chamber and H(2) gas was permeated through the sheet. The permeation of H(2) through the 0.3 mm thick PET sheet started within a few minutes and became saturated in the permeation rate within a few hours after the pressure difference was applied. With the 100-nm thick DLC coating, the response of H(2) permeation was delayed and the permeation rate was decreased.
引用
收藏
页码：S241 / S244
页数：4
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