SURFACE ACOUSTIC WAVE GENERATION AND PROPAGATION ON POLAR GLASS-CERAMIC FOR HIGH TEMPERATURE SENSORS

被引：0

作者：

Dupla, Florian ^{[1
]}

Renoirt, Marie-Sophie ^{[1
]}

Gonon, Maurice ^{[1
]}

Smagin, Nikolay ^{[2
]}

Duquennoy, Marc ^{[2
]}

Martic, Gregory ^{[3
]}

Rguiti, Mohamed ^{[4
]}

机构：

[1] Univ Mons, Mat Inst, Mons, Belgium

[2] Polytech Univ Hauts France, IEMN DOAE CNRS 8520, F-8520 Valenciennes, France

[3] INISMA, CRIBC, Mons, Belgium

[4] Polytech Univ Hauts France, LMCPA, Maubeuge, France

来源：

2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) | 2019年

关键词：

Surface acoustic waves; Interdigital transducer; Glass-ceramic; Fresnoite; High temperature;

D O I：

10.1109/transducers.2019.8808519

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a surface acoustic wave (SAW) device able to operate up to 900 degrees C, based on a piezoelectric non-ferroelectric glass-ceramic containing fresnoite crystals. This material is synthesized by a classic glassmaking technique and isothermal crystallization heat treatment. Its properties are measured at high temperatures. Input and output interdigital transducers (IDT) are realized on its surface to generate and receive the SAW. It creates a temperature device working up to 800 degrees C, that will further be modified in pressure or humidity sensors by applying the appropriate sensitive layer between the input and the output IDT.

引用

页码：1921 / 1924

页数：4

共 7 条

[1] Ferroelectric materials for high temperature piezoelectric applications [J].