Highly sensitive ZnO thin film bulk acoustic resonator for hydrogen detection

被引：19
作者：
Chen, Da [1 ]
Wang, Jing-jing [2 ]
Liu, Qi-xin [1 ]
Xu, Yan [1 ]
Li, De-hua [1 ]
Liu, Yi-jian [1 ]
机构：
[1] Shandong Univ Sci & Technol, Coll Sci, Dept Appl Phys, Qingdao Key Lab Terahertz Technol, Qingdao 266510, Peoples R China
[2] Shandong Univ Sci & Technol, Jinan 250031, Peoples R China
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2011年 / 21卷 / 11期
基金：
美国国家科学基金会;
关键词：
SENSOR; GAS; SAW; PD; MICROCANTILEVER; COMPENSATION; NANOFIBER; LAYER; GHZ; ALN;
D O I：
10.1088/0960-1317/21/11/115018
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We apply a thin film bulk acoustic resonator for hydrogen detection. The resonator working at 2.39 GHz consists of a ZnO piezoelectric stack and an Al/W Bragg reflector. A Pd film is coated on the top of a piezoelectric film as the electrode and sensing coating to capture hydrogen. The resonance frequency of the resonator reduces progressively with the increase of hydrogen concentration due to the mass addition on the Pd layer after hydrogenation. The experimental results show that our proposed sensor can yield the sensitive, linear, reversible, repeatable and stable responses to hydrogen in the concentration range of 0.05%-3% at room temperature. The limit of detection at room temperature is as low as 0.05%. This study proves that the thin film bulk acoustic resonator is a promising and feasible platform for the hydrogen sensor working at room temperature.
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页数：7
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