Highly sensitive ZnO thin film bulk acoustic resonator for hydrogen detection

被引：19

作者：

Chen, Da ^{[1
]}

Wang, Jing-jing ^{[2
]}

Liu, Qi-xin ^{[1
]}

Xu, Yan ^{[1
]}

Li, De-hua ^{[1
]}

Liu, Yi-jian ^{[1
]}

机构：

[1] Shandong Univ Sci & Technol, Coll Sci, Dept Appl Phys, Qingdao Key Lab Terahertz Technol, Qingdao 266510, Peoples R China

[2] Shandong Univ Sci & Technol, Jinan 250031, Peoples R China

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2011年 / 21卷 / 11期

基金：

美国国家科学基金会;

关键词：

SENSOR; GAS; SAW; PD; MICROCANTILEVER; COMPENSATION; NANOFIBER; LAYER; GHZ; ALN;

D O I：

10.1088/0960-1317/21/11/115018

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We apply a thin film bulk acoustic resonator for hydrogen detection. The resonator working at 2.39 GHz consists of a ZnO piezoelectric stack and an Al/W Bragg reflector. A Pd film is coated on the top of a piezoelectric film as the electrode and sensing coating to capture hydrogen. The resonance frequency of the resonator reduces progressively with the increase of hydrogen concentration due to the mass addition on the Pd layer after hydrogenation. The experimental results show that our proposed sensor can yield the sensitive, linear, reversible, repeatable and stable responses to hydrogen in the concentration range of 0.05%-3% at room temperature. The limit of detection at room temperature is as low as 0.05%. This study proves that the thin film bulk acoustic resonator is a promising and feasible platform for the hydrogen sensor working at room temperature.

引用

页数：7

共 26 条

[1] Polypyrrole nanofiber surface acoustic wave gas sensors [J].

Al-Mashat, Laith ;

Tran, Henry D. ;

Wlodarski, Wojtek ;

Kaner, Richard B. ;

Kalantar-Zadeh, Kourosh .

SENSORS AND ACTUATORS B-CHEMICAL, 2008, 134 (02) :826-831

[2] ELASTIC PROPERTIES OF THIN-FILM PALLADIUM FOR SURFACE-ACOUSTIC-WAVE (SAW) SENSORS [J].

ANISIMKIN, VI ;

KOTELYANSKII, IM ;

VERARDI, P ;

VERONA, E .

SENSORS AND ACTUATORS B-CHEMICAL, 1995, 23 (2-3) :203-208

[3] Metal oxide hydrogen, oxygen, and carbon monoxide sensors for hydrogen setups and cells [J].

Aroutiounian, Vladimir .

INTERNATIONAL JOURNAL OF HYDROGEN ENERGY, 2007, 32 (09) :1145-1158

[4] Hydrogen gas sensor based on highly ordered polyaniline nanofibers [J].

Arsat, R. ;

Yu, X. F. ;

Li, Y. X. ;

Wlodarski, W. ;

Kalantar-zadeh, K. .

SENSORS AND ACTUATORS B-CHEMICAL, 2009, 137 (02) :529-532

[5] Layered SAW gas sensor based on CSA synthesized polyaniline nanofiber on AlN on 64° YX LiNbO3 for H2 sensing [J].

Atashbar, M. Z. ;

Sadek, A. Z. ;

Wlodarski, W. ;

Sriram, S. ;

Bhaskaran, M. ;

Cheng, C. J. ;

Kaner, R. B. ;

Kalantar-zadeh, K. .

SENSORS AND ACTUATORS B-CHEMICAL, 2009, 138 (01) :85-89

[6] Design and performance of a microcantilever-based hydrogen sensor [J].

Baselt, DR ;

Fruhberger, B ;

Klaassen, E ;

Cemalovic, S ;

Britton, CL ;

Patel, SV ;

Mlsna, TE ;

McCorkle, D ;

Warmack, B .

SENSORS AND ACTUATORS B-CHEMICAL, 2003, 88 (02) :120-131

[7] Solidly mounted resonators operated in thickness shear mode based on c-axis oriented AlN films [J].

Chen, Da ;

Wang, Jingjing ;

Li, Dehua ;

Xu, Yan ;

Li, Zhaoxin .

SENSORS AND ACTUATORS A-PHYSICAL, 2011, 165 (02) :379-384

[8] Nerve gas sensor using film bulk acoustic resonator modified with a self-assembled Cu2+/11-mercaptoundecanoic acid bilayer [J].

Chen, Da ;

Xu, Yan ;

Wang, Jingjing ;

Zhang, Luyin .

SENSORS AND ACTUATORS B-CHEMICAL, 2010, 150 (01) :483-486

[9] Study on Pd functionalization of microcantilever for hydrogen detection promotion [J].

Chou, Yen-I ;

Chiang, Hsu-Cheng ;

Wang, Chi-Chuan .

SENSORS AND ACTUATORS B-CHEMICAL, 2008, 129 (01) :72-78

[10]

HUERT T, 2011, SENSOR ACTUAT B-CHEM, V157, P329

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