Magnetostatic wave transducers on silicon wafers and on silicon membranes

被引：0

作者：

Matei, E ^{[1
]}

Sajin, G ^{[1
]}

Avramescu, V ^{[1
]}

Dragoman, M ^{[1
]}

Marcelli, R ^{[1
]}

机构：

[1] Natl Res & Dev Inst Microtechnol, Bucharest, Romania

来源：

CAS'98 PROCEEDINGS - 1998 INTERNATIONAL SEMICONDUCTOR CONFERENCE, 21ST EDITION, VOLS 1 AND 2 | 1998年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The paper presents the design. realisation and experiments of MSW launchers and detectors made or? silicon wafers and silicon membranes S parameters measurement on ferrite unloaded and on magnetised ferrite loaded structures demonstrated the feasibility of such transducer. Using the silicon membranes to support these devices offers the advantage of miniaturisation with important openings toward microwave circuit integration on semiconductor substrate.

引用

页码：635 / 638

页数：4