Development and Application Test of Scattering-type Scanning Near-field Optical Microscope

被引：1
作者：
Chen Nan [1 ,2 ]
Wang Yue [1 ]
Liu Tao [1 ,2 ]
Xia Yang [1 ,2 ,3 ,4 ]
机构：
[1] Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
[3] Beijing Res Ctr Engn & Technol Instrument & Equip, Beijing 100029, Peoples R China
[4] Beijing Key Lab IC Test Technol, Beijing 100029, Peoples R China
来源：
ACTA PHOTONICA SINICA | 2021年 / 50卷 / 11期
基金：
中国国家自然科学基金;
关键词：
Scattering-type scanning near field optical microscopy; Scanning probe microscope; Near-field optics; Diffraction limit; Super-resolution; RESOLUTION;
D O I：
10.3788/gzxb20215011.1111001
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Based on scanning probe microscope, a set of scattering scanning near-field optical imaging device is designed. The structure of the device and the basic near-field signal detection principle are introduced, andthe influence of the demodulation order, focus spot size and other factors on the near-field optical signal extraction are discussed through models and experiments. In order to verify the performance of the device, a sample of gold nano-particles and a sample of h-BN microcrystals be characterized. The results show that the home-made device achieves a spatial resolution of 10 nm, and the standing wave phenomenon formed by the h-BN phonon polarization excimer can be clearly observed, demonstrating the huge application potential of this technology.
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页数：9
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