Near-diffraction-limited coherent emission from large aperture antiguided vertical-cavity surface-emitting laser arrays

被引：75
作者：
Bao, L
Kim, NH
Mawst, LJ
Elkin, NN
Troshchieva, VN
Vysotsky, DV
Napartovich, AP
机构：
[1] Univ Wisconsin, Reed Ctr Photon, Dept Elect Comp Engn, Madison, WI 53706 USA
[2] Troitsk Inst Innovat & Fus Res TRINITI, State Sci Ctr, Trinti Troitsk 142190, Moscow Region, Russia
来源：
APPLIED PHYSICS LETTERS | 2004年 / 84卷 / 03期
关键词：
D O I：
10.1063/1.1640799
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We demonstrate that in-phase mode operation with a near-diffraction-limited beam can be realized in large aperture (up to 100 elements) antiguided vertical-cavity surface-emitting laser (VCSEL) arrays. A selective etching process with two-step metalorganic chemical vapor deposition is used for fabrication of the antiguided VCSEL array structures. Modal discrimination is enhanced by intentionally choosing a GaAs cap thickness so as to introduce suitable loss to array interelement regions. Far field patterns indicate in-phase mode operation from both triangular and rectangular geometry antiguided VCSEL arrays, which is in good agreement with theory. (C) 2004 American Institute of Physics.
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页码：320 / 322
页数：3
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