共 50 条
[31]
Ashing properties in a surface-wave mode plasma with a high-permittivity alumina window
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
2001, 40 (10)
:5856-5860
[33]
Characteristics of a large-diameter surface-wave mode microwave-induced plasma
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS,
1998, 37 (2A)
:L170-L173
[36]
Chemical Vapor Deposition of Silicon Nitride Film Enhanced by Surface-Wave Plasma for Surface Passivation of AlGaN/GaN Device
[J].
IRAGO CONFERENCE 2014,
2015, 1649
:41-46
[37]
Hydrophilicity of polyimide surface-modified by plasma bombardment
[J].
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology,
2009, 29 (06)
:664-668