Determination of the excited argon states densities in high-frequency capacitive discharge

被引：13

作者：

Kovalev, A. S. ^{[1
]}

Kurchikov, K. A. ^{[1
]}

Proshina, O., V ^{[1
]}

Rakhimova, T., V ^{[1
]}

Vasilieva, A. N. ^{[1
]}

Voloshin, D. G. ^{[1
]}

机构：

[1] MSU, SINP, 1 2 Leninskie Gory,GSP 1, Moscow 119991, Russia

来源：

PHYSICS OF PLASMAS | 2019年 / 26卷 / 12期

关键词：

ELECTRON-IMPACT EXCITATION; CROSS-SECTIONS; PLASMA SPECTROSCOPY; ESCAPE FACTOR; HAIRPIN RESONATOR; ENERGY; MODEL; ABSORPTION;

D O I：

10.1063/1.5123989

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

An experimental measurement of the density of excited argon states 1s5, 1s4, 1s3, and 1s2 was carried out for an rf capacitive discharge in argon at a frequency of 13.56 MHz and 81 MHz for two pressures of 50 and 100 mTorr in a wide range of discharge applied power. A collision-radiative model was developed to calculate the densities of 1s states from the known electron density and the electron energy distribution function. The electron energy distribution function is obtained from a self-consistent discharge simulation based on the Particle in cell with Monte Carlo collisions model. It is shown that the calculated densities of the metastable states of argon are in good agreement with the experimentally measured ones. The calculated resonance state densities are underestimated.

引用

页数：12

共 52 条

[1]

Anderson LW, 2000, ADV ATOM MOL OPT PHY, V43, P295

[2] Impact of VUV photons on SiO2 and organosilicate low-k dielectrics: General behavior, practical applications, and atomic models [J].

Baklanov, M. R. ;

Jousseaume, V. ;

Rakhimova, T. V. ;

Lopaev, D. V. ;

Mankelevich, Yu. A. ;

Afanas'ev, V. V. ;

Shohet, J. L. ;

King, S. W. ;

Ryan, E. T. .

APPLIED PHYSICS REVIEWS, 2019, 6 (01)

[3] 4s(3)P(2) metastable level density and temperature measurement in a low-density argon plasma [J].

Beverini, N ;

Cicconi, G ;

Genoves, GL ;

Piano, E .

PLASMA SOURCES SCIENCE & TECHNOLOGY, 1997, 6 (02) :185-188

[4] MONTE-CARLO SIMULATION OF ELECTRON SWARM MOTION IN SF6 [J].

BOEUF, JP ;

MARODE, E .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1984, 17 (06) :1133-1148

[5] Electron-impact excitation of argon: Optical emission cross sections in the range of 300-2500 nm [J].

Boffard, John B. ;

Chiaro, B. ;

Weber, Tobin ;

Lin, Chun C. .

ATOMIC DATA AND NUCLEAR DATA TABLES, 2007, 93 (06) :831-863

[6] Measurement of metastable and resonance level densities in rare-gas plasmas by optical emission spectroscopy [J].

Boffard, John B. ;

Jung, R. O. ;

Lin, Chun C. ;

Wendt, A. E. .

PLASMA SOURCES SCIENCE & TECHNOLOGY, 2009, 18 (03)

[7] Collisional-radiative model for an argon glow discharge [J].

Bogaerts, A ;

Gijbels, R ;

Vlcek, J .

JOURNAL OF APPLIED PHYSICS, 1998, 84 (01) :121-136

[8] Experimental and theoretical study of dynamic effects in low-frequency capacitively coupled discharges [J].

Braginsky, O. ;

Kovalev, A. ;

Lopaev, D. ;

Proshina, O. ;

Rakhimova, T. ;

Vasilieva, A. ;

Voloshin, D. ;

Zyryanov, S. .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2012, 45 (01)

[9] Recombination and enhanced metastable repopulation in the argon afterglow [J].

Celik, Yusuf ;

Tsankov, Tsanko V. ;

Aramaki, Mitsutoshi ;

Yoshimura, Shinji ;

Luggenhoelscher, Dirk ;

Czarnetzki, Uwe .

PHYSICAL REVIEW E, 2012, 85 (05)

[10]

CHUTJIAN A, 1981, PHYS REV A, V23, P2178, DOI 10.1103/PhysRevA.23.2178

← 1 2 3 4 5 6 →