A MEMS piezoelectric solid disk gyroscope with improved sensitivity

被引：8

作者：

Cheng, Yuxiang ^{[1
]}

Zhang, Weiping ^{[1
]}

Tang, Jian ^{[1
]}

Sun, Dianjun ^{[1
]}

Chen, Wenyuan ^{[1
]}

机构：

[1] Shanghai Jiao Tong Univ, Lab Thin Film & Micro Fabricat,Dept Micronano Ele, Natl Key Lab Sci & Technol,Micro Nano Fabricat La, Minist Educ,Sch Elect Informat & Elect Engn, Shanghai 200240, Peoples R China

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2015年 / 21卷 / 06期

关键词：

MODE;

D O I：

10.1007/s00542-014-2344-z

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper introduces a MEMS piezoelectric solid disk gyroscope. The gyroscope operates in an in-plane elliptic bulk acoustic wave mode with a frequency of 284 kHz. This gyroscope is an improvement of the solid piezoelectric gyroscope. A device, 6 mm in diameter, has been fabricated through the microelectromechanical systems process, and achieved a relatively high sensitivity and bias instability. In this paper, it is described that the design, fabrication, circuit system and characteristics of the piezoelectric solid disk gyroscope.

引用

页码：1371 / 1377

页数：7

共 12 条

[1] A HARPSS polysilicon vibrating ring gyroscope [J].

Ayazi, F ;

Najafi, K .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2001, 10 (02) :169-179

[2] High aspect-ratio combined poly and single-crystal silicon (HARPSS) MEMS technology [J].

Ayazi, F ;

Najafi, K .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2000, 9 (03) :288-294

[3] MEMS-based piezoelectric BAW resonator based on out-of-plane degenerate mode for micro angular detector [J].

Cheng, Y. X. ;

Zhang, W. P. ;

Guan, R. ;

Zhang, G. ;

Xu, Z. X. ;

Chen, W. Y. .

ELECTRONICS LETTERS, 2013, 49 (06) :406-407

[4]

Cho J., 2013, 2013 Transducers & Eurosensors XXVII: 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), P1847, DOI 10.1109/Transducers.2013.6627150

[5] VHF single-crystal silicon elliptic bulk-mode capacitive disk resonators - Part I: Design and modeling [J].

Hao, Z ;

Pourkamali, S ;

Ayazi, F .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2004, 13 (06) :1043-1053

[6] A single-crystal silicon vibrating ring gyroscope [J].

He, GH ;

Najafi, K .

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2002, :718-721

[7] The development of micro-gyroscope technology [J].

Liu, Kai ;

Zhang, Weiping ;

Chen, Wenyuan ;

Li, Kai ;

Dai, Fuyan ;

Cui, Feng ;

Wu, Xiaosheng ;

Ma, Gaoyin ;

Xiao, Qijun .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2009, 19 (11)

[8] Proposal of 2-axis Bulk-PZT Gyroscope [J].

Maekawa, Kenta ;

Tanaka, Yoshito ;

Fujita, Takayuki ;

Maenaka, Kazusuke .

SERVICE ROBOTICS AND MECHATRONICS, 2010, :305-308

[9]

Maenaka K, 2006, PROC IEEE MICR ELECT, P634

[10]

Pai P, 2012, MEMS BASED HEMISPHER, P1

← 1 2 →