Hard Cr-Al-Si-B-(N) Coatings with Oxidation Resistance up to 1200°C

被引：11
作者：
Kiryukhantsev-Korneev, Ph. V. [1 ]
Pierson, J. F. [2 ]
Bauer, J. Ph. [2 ]
Levashov, E. A. [1 ]
Shtansky, D. V. [1 ]
机构：
[1] Natl Univ Sci & Technol, Moscow Steel & Alloys Inst, Moscow 119049, Russia
[2] Inst Jean Lamour, F-54042 Nancy, France
来源：
GLASS PHYSICS AND CHEMISTRY | 2011年 / 37卷 / 04期
关键词：
Cr-Al-Si-B-N coatings; magnetron sputtering; multicomponent SHS targets; composition and structure; physical and mechanical properties; oxidation resistance; CR-B-N; MECHANICAL-PROPERTIES; THIN-FILMS; THERMAL-STABILITY; SI; AL; MULTILAYER; MICROSTRUCTURE; DEPOSITION; PRESSURE;
D O I：
10.1134/S1087659611040109
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The results of studies of the structure and properties of Cr-Al-Si-B and Cr-Al-Si-B-N coatings prepared by magnetron sputtering of multicomponent CrAlSiB targets of the in an argon atmosphere and gas mixtures of argon and nitrogen are presented. The microstructure and the phase and chemical compositions of the coatings have been determined using X-ray diffraction (XRD), transmission and scanning electron microscopy, infrared spectroscopy (IR), and glow discharge optical emission spectroscopy. The hardness, elastic modulus, and elastic recovery of the coatings, as well as their resistance to high-temperature oxidation, have been determined. It has been found that the Cr-Al-Si-B-(N) coatings have an amorphous structure in which the B-N and Si-N bonds are revealed at high concentrations of nitrogen. Depending on the composition, the coatings exhibit a hardness in the range 18-30 GPa, an elastic modulus of 250-400 GPa, an elastic recovery of 39-44%, and an oxidation resistance up to 1100-1200 degrees C. A comparative analysis of data on the Cr-Al-Si-B-(N) and Cr-B-(N) systems has been performed.
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收藏
页码：411 / 417
页数：7
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