Modal Analysis of a Single-Structure Multiaxis MEMS Gyroscope

被引：12

作者：

Shah, Muhammad Ali ^{[1
,2
]}

Iqbal, Faisal ^{[1
]}

Shah, Ibrar Ali ^{[3
]}

Lee, Byeungleul ^{[1
]}

机构：

[1] Korea Univ Technol & Educ KoreaTech, Sch Mechatron Engn, 1600 Chungjeol Ro, Cheonan Si 330708, Chungcheongnam, South Korea

[2] Shinsung Adv Inst Shinsung C&T, Gasan 2 Ro, Seoul, South Korea

[3] Univ Engn & Technol Peshawar, Dept Comp Software Engn, Mardan Campus, Peshawar, Khyber Pakhtunk, Pakistan

来源：

JOURNAL OF SENSORS | 2016年 / 2016卷

关键词：

MATLAB - Multiphysics - Finite element method - Modal analysis;

D O I：

10.1155/2016/4615389

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on designing a single-structure triaxes MEMS capacitive gyroscope which is capable of measuring the three angular velocities on a single drive. A Z-shaped beam for the support of folded coupling spring has been applied to suppress the unwanted mode and decrease the stress effect at the spring ends. The unique coupling spring has changed the driving motion, due to which slide film damping in the driving mode has been reduced. This reduction can lead to higher performance of the sensor with less requirements on vacuum level which decreases the cost of fabrication. Simulation analysis has been performed in COMSOL Multiphysics and Matlab Simulink to finalize the design for fabrication. After finite element analysis, the driving, x-sensing, z-sensing, and y-sensing are, respectively, found to be 13.30KHz, 13.40KHz, 13.47KHz, and 13.51KHz.

引用

页数：8

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