Patterning surface oxide nanostructures using atomic force microscope local anodic oxidation

被引：3

作者：

Kim, Tae Young ^{[1
]}

Di Zitti, Ermanno ^{[1
]}

Ricci, Davide ^{[1
,2
]}

Cincotti, Silvano ^{[1
]}

机构：

[1] Univ Genoa, Dipartimento Ingn Biofis & Elettron, I-16145 Genoa, Italy

[2] IIT, I-16163 Genoa, Italy

来源：

PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES | 2008年 / 40卷 / 06期

关键词：

local anodic oxidation; atomic force microscope; nanostructures; pulsed voltage;

D O I：

10.1016/j.physe.2007.08.085

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We show how the analysis of the current detected during the fabrication of titanium oxide dots by AFM local anodic oxidation allows the determination of the optimal duration of bias voltage for obtaining nanostructures with higher aspect ratio. Experimental conditions to fabricate oxide dots and lines are discussed. Finally, we demonstrate that proper values of scan rate and period of a pulsed bias voltage enables the selective oxidation of dots and lines. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：1941 / 1943

页数：3

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