Low-voltage hot electrons and soft-programming lifetime prediction in nonvolatile memory cells

被引:24
作者
Ghetti, A
Selmi, L
Bez, RT
机构
[1] Univ Bologna, Dept Elect, I-40136 Bologna, Italy
[2] Univ Udine, DIEGM, I-33100 Udine, Italy
[3] ST Microelect, Milan, Italy
关键词
charge injection; EPROM hot carriers; MOSFET's; reliability estimation;
D O I
10.1109/16.753703
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper reports experiments and Monte Carlo (MC) simulations of flash memory cells at the typical bias conditions of read operations (high V-GS and low V-DS) leading to the soft-programming phenomenon. Comparing experiments with simulations we first show that, differently from the previously reported ease of homogeneous injection experiments, efficient energy gain mechanisms must be invoked to explain the order of magnitude of gate (I-G) and substrate (I-B) currents at low voltage, Second, the voltage scaling behavior of the soft-programming lifetime is analyzed and the validity of usual extrapolation techniques to evaluate this parameter is addressed.
引用
收藏
页码:696 / 702
页数:7
相关论文
共 37 条
[1]  
Abramo A, 1995, INTERNATIONAL ELECTRON DEVICES MEETING, 1995 - IEDM TECHNICAL DIGEST, P301, DOI 10.1109/IEDM.1995.499201
[2]   A NUMERICAL-METHOD TO COMPUTE ISOTROPIC BAND MODELS FROM ANISOTROPIC SEMICONDUCTOR BAND STRUCTURES [J].
ABRAMO, A ;
VENTURI, F ;
SANGIORGI, E ;
HIGMAN, JM ;
RICCO, B .
IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS, 1993, 12 (09) :1327-1336
[3]   A MULTIBAND MONTE-CARLO APPROACH TO COULOMB INTERACTION FOR DEVICE ANALYSIS [J].
ABRAMO, A ;
BRUNETTI, R ;
JACOBONI, C ;
VENTURI, F ;
SANGIORGI, E .
JOURNAL OF APPLIED PHYSICS, 1994, 76 (10) :5786-5794
[4]   ELECTRON AND HOLE MOBILITIES IN SILICON AS A FUNCTION OF CONCENTRATION AND TEMPERATURE [J].
ARORA, ND ;
HAUSER, JR ;
ROULSTON, DJ .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1982, 29 (02) :292-295
[5]   IMPACT IONIZATION IN SEMICONDUCTORS - EFFECTS OF HIGH ELECTRIC-FIELDS AND HIGH SCATTERING RATES [J].
BUDE, J ;
HESS, K ;
IAFRATE, GJ .
PHYSICAL REVIEW B, 1992, 45 (19) :10958-10964
[6]   IMPACT IONIZATION AND DISTRIBUTION-FUNCTIONS IN SUBMICRON NMOSFET TECHNOLOGIES [J].
BUDE, JD ;
MASTRAPASQUA, M .
IEEE ELECTRON DEVICE LETTERS, 1995, 16 (10) :439-441
[7]   Determination of threshold energy for hot electron interface state generation [J].
Bude, JD ;
Iizuka, T ;
Kamakura, Y .
IEDM - INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST 1996, 1996, :865-868
[8]  
Bude JD, 1995, INTERNATIONAL ELECTRON DEVICES MEETING, 1995 - IEDM TECHNICAL DIGEST, P989, DOI 10.1109/IEDM.1995.499382
[9]  
BUDE JD, 1995, P S VLSI TECHN, P101
[10]  
CAPPELLETTI P, 1995, P NONV MEM WORKSH