The Double-edged Sword of Femtosecond Laser-Induced Periodic Surface Structures for Sub-diffraction and High-efficient Nanotexturing

被引:0
作者
Wang, Lei [1 ]
Li, Zhen-Ze [1 ]
Fan, Hua [1 ]
Yu, Yan-Hao [1 ]
Chen, Qi-Dai [1 ]
Juodkazis, Saulius [2 ,3 ]
Sun, Hong-Bo [4 ]
机构
[1] Jilin Univ, Coll Elect Sci & Engn, State Key Lab Integrated Optoelect, Changchun 130012, Peoples R China
[2] Swinburne Univ Technol, Fac Sci Engn & Technol, Ctr Microphoton, Hawthorn, Vic 3122, Australia
[3] ANFF, Melbourne Ctr Nanofabricat, 151 Wellington Rd, Clayton, Vic 3168, Australia
[4] Tsinghua Univ, Dept Precis Instrument, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China
来源
SPIE MICRO + NANO MATERIALS, DEVICES, AND APPLICATIONS 2019 | 2019年 / 11201卷
关键词
laser-matter interaction; laser-induced periodic surface structures; plasmonic imprinting; light tailoring; large area; freeform structures; SUBWAVELENGTH;
D O I
10.1117/12.2541062
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Laser-induced periodic surface structures (LIPSS) have gained lots of attention for the rich physics and potentials in sub-diffraction nanostructuring. Herein, we report new aspects of LIPSS to uniformly extend the periodicity to macro, or conversely suppress the periodicity to obtain freeform nanostructures. We have focused on the electron excitation, effective surface permittivity modifications, and plasmonic standing wave ablation for the structure origination and evolution. A plasmonic nanoimprinting model in long range and a nanohole-based light field enhancement in the nearfield are proposed, which are in good accord with the experiments. The nanotextured surface is obtained in a large area by light tailoring method with a cylindrical lens focusing and scanning. Besides, a critical power control method to confine the light field in nanoregion are conducted to obtain the freeform nanostructures, which have potential applications in birefringent optics and nanoscience.
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页数:2
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