Improved preparation procedure and properties for a multilayer piezoelectric thick-film actuator

被引：24
作者：
Yao, K
Zhu, WG
机构：
[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Ctr Microelect, Singapore 639798, Singapore
[2] Inst Mat Res & Engn, Singapore 119260, Singapore
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 71卷 / 1-2期
关键词：
multilayer thick film; piezoelectric actuator; PZT; screen printing; isostatic pressure;
D O I：
10.1016/S0924-4247(98)00162-9
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Low-voltage multilayer piezoelectric lead zirconate titanate (PZT) based thick-film displacement actuators were fabricated on Al2O3 ceramic substrate using a multiple screen-printing process. High isostatic pressure was applied on the multilayer green film before firing to increase the material density and the bonding strength between electrode layer and piezoelectric layer. It was demonstrated that the feasibility for producing multilayer actuators on the substrate was significantly improved with the compression process introduced and the ferroelectric and piezoelectric properties of the final actuator samples were greatly improved as well. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
收藏
页码：139 / 143
页数：5
相关论文
共 12 条
[1]   Preparation of piezoelectric thick films using a jet printing system [J].
Adachi, H ;
Kuroda, Y ;
Imahashi, T ;
Yanagisawa, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1997, 36 (3A) :1159-1163
[2]   DIELECTRIC, FERROELECTRIC, AND PIEZOELECTRIC PROPERTIES OF LEAD-ZIRCONATE-TITANATE THICK-FILMS ON SILICON SUBSTRATES [J].
CHEN, HD ;
UDAYAKUMAR, KR ;
CROSS, LE ;
BERNSTEIN, JJ ;
NILES, LC .
JOURNAL OF APPLIED PHYSICS, 1995, 77 (07) :3349-3353
[3]  
Collier J., 1994, Ferroelectrics, V154, P47, DOI 10.1080/00150199408017260
[4]   Elastic surface wave devices based on piezoelectric thick-films [J].
DeCicco, G ;
Morten, B ;
Prudenziati, M .
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1996, 43 (01) :73-77
[5]   DEVELOPMENT OF PIEZOELECTRIC MICROMOVEMENT ACTUATOR FABRICATION USING A THICK-FILM DOUBLE-PASTE PRINTING METHOD [J].
MOILANEN, H ;
LAPPALAINEN, J ;
LEPPAVUORI, S .
SENSORS AND ACTUATORS A-PHYSICAL, 1994, 43 (1-3) :357-365
[6]   FABRICATION OF PIEZOELECTRIC THICK-FILM LOW-VOLTAGE MULTILAYER ACTUATORS USING A NEW DOUBLE-PASTE PRINTING TECHNIQUE [J].
MOILANEN, H ;
LEPPAVUORI, S ;
UUSIMAKI, A .
SENSORS AND ACTUATORS A-PHYSICAL, 1993, 37-8 :106-111
[7]  
MOILANEN H, 1994, SENSOR ACTUAT A-PHYS, V41, P421
[8]   RESONANT PRESSURE SENSOR BASED ON PIEZOELECTRIC PROPERTIES OF FERROELECTRIC THICK-FILMS [J].
MORTEN, B ;
DECICCO, G ;
PRUDENZIATI, M .
SENSORS AND ACTUATORS A-PHYSICAL, 1992, 31 (1-3) :153-158
[9]  
Morten B., 1992, Hybrid Circuits, P25
[10]  
Prudenziati M., 1995, MICROELECTRON INT, V38, P5
12