High-Electrical-Conductivity Multilayer Graphene Formed by Layer Exchange with Controlled Thickness and Interlayer

被引:106
作者
Murata, Hiromasa [1 ]
Nakajima, Yoshiki [1 ]
Saitoh, Noriyuki [2 ]
Yoshizawa, Noriko [2 ]
Suemasu, Takashi [1 ]
Toko, Kaoru [1 ,3 ]
机构
[1] Univ Tsukuba, Inst Appl Phys, 1-1-1 Tennodai, Tsukuba, Ibaraki 3058573, Japan
[2] AIST, TIA, Electron Microscope Facil, 16-1 Onogawa, Tsukuba, Ibaraki 3058569, Japan
[3] Japan Sci & Technol Agcy, PRESTO, 4-1-8 Honcho, Kawaguchi, Saitama 3320012, Japan
关键词
INDUCED CRYSTALLIZATION; CARBON DIFFUSION; DIRECT GROWTH; FILMS;
D O I
10.1038/s41598-019-40547-0
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
The layer exchange technique enables high-quality multilayer graphene (MLG) on arbitrary substrates, which is a key to combining advanced electronic devices with carbon materials. We synthesize uniform MLG layers of various thicknesses, t, ranging from 5 nm to 200 nm using Ni-induced layer exchange at 800 degrees C. Raman and transmission electron microscopy studies show the crystal quality of MLG is relatively low for t <= 20 nm and dramatically improves for t >= 50 nm when we prepare a diffusion controlling Al2O3 interlayer between the C and Ni layers. Hall effect measurements reveal the carrier mobility for t = 50 nm is 550 cm(2)/Vs, which is the highest Hall mobility in MLG directly formed on an insulator. The electrical conductivity (2700 S/cm) also exceeds a highly oriented pyrolytic graphite synthesized at 3000 degrees C or higher. Synthesis technology of MLG with a wide range of thicknesses will enable exploration of extensive device applications of carbon materials.
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页数:5
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