[1] Univ Tsukuba, Inst Appl Phys, 1-1-1 Tennodai, Tsukuba, Ibaraki 3058573, Japan
[2] AIST, TIA, Electron Microscope Facil, 16-1 Onogawa, Tsukuba, Ibaraki 3058569, Japan
[3] Japan Sci & Technol Agcy, PRESTO, 4-1-8 Honcho, Kawaguchi, Saitama 3320012, Japan