Integrated piezoresistive position detection for electrostatic driven micro scanning mirrors

被引：9

作者：

Grahmann, Jan ^{[1
]}

Grasshoff, Thomas ^{[1
]}

Conrad, Holger ^{[1
]}

Sandner, Thilo ^{[1
]}

Schenk, Harald ^{[1
]}

机构：

[1] Fraunhofer Inst Photon Microsyst IPMS, D-01109 Dresden, Germany

来源：

MOEMS AND MINIATURIZED SYSTEMS X | 2011年 / 7930卷

关键词：

MOEMS; scanning micromirror; piezoresistive; position sensor; angular sensor; optical SOI-MEMS;

D O I：

10.1117/12.874979

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We have been developing a piezoresistive position detection for scanning micro mirrors in order to combine high position resolution with the capability of monolithic integration. In comparison to our formerly published results, the sensor sensitivity was strongly enhanced by implanting a 1 mu m thick p-doped layer of NA approximate to 10(17) cm(-3) into the lowly p-doped SOI device layer of NA approximate to 10(15) cm(-3). This sensitivity was even further improved by at least a factor of 3 by a novel sensor design, allowing to couple more mechanical stress into the sensor structure.

引用

页数：8

共 4 条

[1]

Gr uger " H., SPIE P, V4987, P284

[2] Integrated position sensing for 2D microscanning mirrors using the SOI-device layer as the piezoresistive mechanical-elastic transformer [J].

Grahmann, Jan ;

Conrad, Holger ;

Sandner, Thilo ;

Klose, Thomas ;

Schenk, Harald .

MOEMS AND MINIATURIZED SYSTEMS VIII, 2009, 7208

[3] Single-detector micro-electro-mechanical scanning grating spectrometer [J].

Kraft, M. ;

Kenda, A. ;

Frank, A. ;

Scherf, W. ;

Heberer, A. ;

Sandner, T. ;

Schenk, H. ;

Zimmer, F. .

ANALYTICAL AND BIOANALYTICAL CHEMISTRY, 2006, 386 (05) :1259-1266

[4] Driver ASIC for synchronized excitation of resonant micro-mirrors [J].

Roscher, KU ;

Fakesch, U ;

Schenk, H ;

Lakner, H ;

Schlebusch, D .

MOEMS DISPLAY AND IMAGING SYSTEMS, 2003, 4985 :121-130

← 1 →