共 50 条
[46]
Formation of silicon oxynitride films with low leakage current using N2/O2 plasma near atmospheric pressure
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS,
2004, 43 (11B)
:7853-7856
[47]
Environmental impact assessment of generating cold atmospheric pressure plasma and plasma-activated water at lab scale
[J].
SUSTAINABLE FOOD TECHNOLOGY,
2025, 3 (04)
:1005-1010