On-chip mid-infrared gas detection using chalcogenide glass waveguide

被引：153

作者：

Han, Z. ^{[1
]}

Lin, P. ^{[2
]}

Singh, V. ^{[1
]}

Kimerling, L. ^{[1
]}

Hu, J. ^{[1
]}

Richardson, K. ^{[3
]}

Agarwal, A. ^{[1
,4
]}

Tan, D. T. H. ^{[5
]}

机构：

[1] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA

[2] Texas A&M Univ, Elect & Comp Engn, College Stn, TX 77843 USA

[3] Univ Cent Florida, Coll Opt & Photon, CREOL, Orlando, FL 32816 USA

[4] MIT, Ctr Mat Proc, Cambridge, MA 02139 USA

[5] Singapore Univ Technol & Design, Photon Devices & Syst Grp, Singapore 487372, Singapore

来源：

APPLIED PHYSICS LETTERS | 2016年 / 108卷 / 14期

基金：

美国国家科学基金会;

关键词：

MACH-ZEHNDER INTERFEROMETER; SPECTROSCOPY; SENSORS;

D O I：

10.1063/1.4945667

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We demonstrate an on-chip sensor for room-temperature detection of methane gas using a broad-band spiral chalcogenide glass waveguide coupled with off-chip laser and detector. The waveguide is fabricated using UV lithography patterning and lift-off after thermal evaporation. We measure the intensity change due to the presence and concentration of methane gas in the mid-infrared (MIR) range. This work provides an approach for broadband planar MIR gas sensing. (C) 2016 AIP Publishing LLC.

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页数：3

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