Porous WO3 from anodized sputtered tungsten thin films for NO2 detection

被引：39
作者：
Hu, Ming [1 ]
Zeng, Jing [1 ]
Wang, Weidan [1 ]
Chen, Huiqing [1 ]
Qin, Yuxiang [1 ]
机构：
[1] Tianjin Univ, Sch Elect & Informat Engn, Tianjin 300072, Peoples R China
来源：
APPLIED SURFACE SCIENCE | 2011年 / 258卷 / 03期
基金：
中国国家自然科学基金;
关键词：
NO2; detection; Porous tungsten oxide; Anodization; Magnetron sputtering; GAS-SENSING PROPERTIES; GRAIN-SIZE; SENSOR; SENSITIVITY; SNO2; DEPOSITION; MORPHOLOGY; SILICON;
D O I：
10.1016/j.apsusc.2011.09.002
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
In this paper, porous WO3 films were prepared by anodic oxidation of metallic tungsten (W) films deposited on alumina substrates. The structural and morphological properties of the porous WO3 films were investigated using field emission scanning electron microscope (FESEM) and X-ray diffraction (XRD). A large number of cracks appeared on the surface of films after anodization, which makes the films porous. The porous WO3 sensors achieved their maximum response values to NO2 at a low operating temperature of 150 degrees C. The porous WO3 sensors showed high response values, great stability and fast response-recovery characteristics to different concentration of NO2 gas due to the high specific surface area and special structural and morphological properties. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码：1062 / 1068
页数：7
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