Fabrication and Analysis of a MEMS NIR Fabry-Perot Interferometer

被引：8

作者：

Russin, Timothy J. ^{[1
]}

Kerber, Maxwell ^{[1
]}

Russin, Alicia ^{[1
]}

Wang, Andrew ^{[1
]}

Waters, Richard ^{[1
]}

机构：

[1] Space & Naval Warfare Syst Ctr Pacific, Adv Integrated Circuit Technol Branch, San Diego, CA 92110 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2012年 / 21卷 / 01期

关键词：

Fabry-Perot interferometers; Raman spectroscopy; tunable filters; COLORIMETRIC SENSOR ARRAY; CHEMICAL SENSORS; FILTERS; WIRES;

D O I：

10.1109/JMEMS.2011.2174413

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report the design and fabrication of a tunable MEMS Fabry-Perot etalon for use in microscale spectroscopic applications. The reflective elements of the interferometer are dielectric mirror stacks optimized for 1500-nm light and the tunability arises via capacitive attraction of a translatablemirror on a spring. The mirror reflectivity was measured to be 97.3%, corresponding to a calculated finesse of 115, while the measured linewidth and FSR are 70 cm(-1) and 334 cm(-1), respectively, corresponding to a measured finesse of 5. [2011-0027]

引用

页码：181 / 189

页数：9

共 50 条

[41] MEMS-Based High-Sensitivity Fabry-Perot Acoustic Sensor With a 45° Angled Fiber [J].

Liu, Bin ;

Lin, Jie ;

Wang, Jian ;

Ye, Chen ;

Jin, Peng .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2016, 28 (05) :581-584

[42] Demonstration of a tunable hybrid laser diode using an electrostatically tunable silicon micromachined Fabry-Perot interferometer device [J].

Sidorin, Y ;

Blomberg, M ;

Karioja, P .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1999, 11 (01) :18-20

[43] Electrothermally actuated Fabry-Perot tunable filter with a high tuning efficiency [J].

Kim, CK ;

Lee, ML ;

Jun, CH .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2004, 16 (08) :1894-1896

[44] Figure testing and calibration of the ISOON Fabry-Perot etalons [J].

Robinson, Brian ;

Balasubramaniam, K. S. ;

Justice, Jerry ;

Pitts, Frank .

SOLAR PHYSICS AND SPACE WEATHER INSTRUMENTATION IV, 2011, 8148

[45] The Characteristics in the Sensitivity of Microfiber Fabry-Perot Interferometric Transducers [J].

Wang, Xiuxin ;

Li, Zhangyong ;

Lin, Jinzhao ;

Wang, Wei ;

Tian, Yin ;

Pang, Yu .

2017 INTERNATIONAL CONFERENCE ON ADVANCED ENVIRONMENTAL ENGINEERING (ICAEE2017), 2018, 111

[46] Fabry-Perot filters with tunable Josephson junction defects [J].

Pierro, Vincenzo ;

Filatrella, Giovanni .

PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS, 2015, 517 :37-40

[47] Solid, 3-mirror Fabry-Perot etalon [J].

Stephen, Mark ;

Fahey, Molly ;

Miller, Ian .

APPLIED OPTICS, 2017, 56 (10) :2636-2640

[48] A Fabry-Perot scanning receiver for microwave signal processing [J].

Winnall, ST ;

Lindsay, AC .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1999, 47 (07) :1385-1390

[49] Multi-mode all Fiber Interferometer based on Fabry-Perot Multi-cavity and its Temperature Response [J].

Lopez-Dieguez, Y. ;

Estudillo-Ayala, J. M. ;

Jauregui-Vazquez, D. ;

Sierra-Hernandez, J. M. ;

Herrera-Piad, L. A. ;

Cruz-Duarte, J. M. ;

Hernandez-Garcia, J. C. ;

Rojas-Laguna, R. .

OPTIK, 2017, 147 :232-239

[50] High-resolution strain and temperature Fabry-Perot Interferometer sensor based on Vernier effect and produced by a femtosecond laser [J].

Paixao, Tiago ;

Araujo, Francisco ;

Antunes, Paulo .

SEVENTH EUROPEAN WORKSHOP ON OPTICAL FIBRE SENSORS (EWOFS 2019), 2019, 11199

← 1 2 3 4 5 →