Fabrication and Analysis of a MEMS NIR Fabry-Perot Interferometer

被引：8

作者：

Russin, Timothy J. ^{[1
]}

Kerber, Maxwell ^{[1
]}

Russin, Alicia ^{[1
]}

Wang, Andrew ^{[1
]}

Waters, Richard ^{[1
]}

机构：

[1] Space & Naval Warfare Syst Ctr Pacific, Adv Integrated Circuit Technol Branch, San Diego, CA 92110 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2012年 / 21卷 / 01期

关键词：

Fabry-Perot interferometers; Raman spectroscopy; tunable filters; COLORIMETRIC SENSOR ARRAY; CHEMICAL SENSORS; FILTERS; WIRES;

D O I：

10.1109/JMEMS.2011.2174413

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report the design and fabrication of a tunable MEMS Fabry-Perot etalon for use in microscale spectroscopic applications. The reflective elements of the interferometer are dielectric mirror stacks optimized for 1500-nm light and the tunability arises via capacitive attraction of a translatablemirror on a spring. The mirror reflectivity was measured to be 97.3%, corresponding to a calculated finesse of 115, while the measured linewidth and FSR are 70 cm(-1) and 334 cm(-1), respectively, corresponding to a measured finesse of 5. [2011-0027]

引用

页码：181 / 189

页数：9

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