On the growth of polycrystalline diamond on transition metals by microwave-plasma-assisted chemical vapour deposition

被引:21
作者
Mallika, K [1 ]
Ramamohan, TR
Jagannadham, K
Komanduri, R
机构
[1] Oklahoma State Univ, Stillwater, OK 74078 USA
[2] N Carolina State Univ, Dept Mat Sci, Raleigh, NC 27695 USA
来源
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1999年 / 79卷 / 04期
基金
美国国家科学基金会;
关键词
D O I
10.1080/13642819908205738
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The role of transition-metal substrates on the deposition of polycrystalline diamond was investigated using a microwave-plasma-assisted chemical vapour deposition process. Diamond deposition was carried out on the transition elements of the first series (3d block) and on the elements belonging to groups VB and VIB. It was found that the chemical nature of the transition metals plays an important role in the formation of diamond. Similarity in morphological features was observed on the diamond films grown on the substrates belonging to the same group. Micro-Raman (mu-Raman) spectroscopy indicated that diamond films on substrates belonging to groups VB and VIE have lower internal stresses than those deposited on group VIII. An attempt was made to relate the trends observed from the mu-Raman spectroscopy to the chemical properties of the transition elements. The mechanism of diamond growth seem to vary across the period. Elements belonging to the first half of the transition series, namely Ti, V, Nb, Ta, Mo and W, form stable carbides. These elements appear to form diamond by a gas-solid-phase reaction, while transition metals, such as Ni and Co appear to nucleate diamond by precipitation from the molten liquid. It may be noted that Ni and Co do not form stable carbides. This tendency appears to be related to the 3d shell structure of these elements. A mechanism based on the electronic structure of the substrate atoms, particularly on their 3d shell structure, is proposed to account for the above behaviour.
引用
收藏
页码:593 / 624
页数:32
相关论文
共 53 条
[1]   QUANTITATIVE MEASUREMENT OF RESIDUAL BIAXIAL STRESS BY RAMAN-SPECTROSCOPY IN DIAMOND GROWN ON A TI ALLOY BY CHEMICAL-VAPOR-DEPOSITION [J].
AGER, JW ;
DRORY, MD .
PHYSICAL REVIEW B, 1993, 48 (04) :2601-2607
[2]   LOW-PRESSURE, METASTABLE GROWTH OF DIAMOND AND DIAMONDLIKE PHASES [J].
ANGUS, JC ;
HAYMAN, CC .
SCIENCE, 1988, 241 (4868) :913-921
[3]  
ANGUS JC, 1993, P 2 INT C APPL DIAM, P159
[4]   Growth of diamond and nickel carbide crystals in the Ni-C-H system [J].
Badzian, A ;
Badzian, T .
DIAMOND AND RELATED MATERIALS, 1996, 5 (01) :93-101
[5]   Residual stresses and debonding of diamond films on titanium alloy substrates [J].
Chandra, L ;
Chhowalla, M ;
Amaratunga, GAJ ;
Clyne, TW .
DIAMOND AND RELATED MATERIALS, 1996, 5 (6-8) :674-681
[6]   MINIMUM-ENERGY PATHS FOR ELEMENTARY REACTIONS IN LOW-PRESSURE DIAMOND-FILM FORMATION [J].
CHANG, XY ;
THOMPSON, DL ;
RAFF, LM .
JOURNAL OF PHYSICAL CHEMISTRY, 1993, 97 (39) :10112-10118
[7]   THEORETICAL-STUDIES OF HYDROGEN-ABSTRACTION REACTIONS FROM DIAMOND AND DIAMOND-LIKE SURFACES [J].
CHANG, XY ;
PERRY, M ;
PEPLOSKI, J ;
THOMPSON, DL ;
RAFF, LM .
JOURNAL OF CHEMICAL PHYSICS, 1993, 99 (06) :4748-4758
[8]   MICRO-RAMAN FOR DIAMOND FILM STRESS-ANALYSIS [J].
CHEN, KH ;
LAI, YL ;
LIN, JC ;
SONG, KJ ;
CHEN, LC ;
HUANG, CY .
DIAMOND AND RELATED MATERIALS, 1995, 4 (04) :460-463
[9]   EFFECT OF THE CHEMICAL NATURE OF TRANSITION-METAL SUBSTRATES ON CHEMICAL-VAPOR-DEPOSITION OF DIAMOND [J].
CHEN, X ;
NARAYAN, J .
JOURNAL OF APPLIED PHYSICS, 1993, 74 (06) :4168-4173
[10]   Kinetic Monte Carlo studies of early surface morphology in diamond film growth by chemical vapor deposition of methyl radical [J].
Clark, MM ;
Raff, LM ;
Scott, HL .
PHYSICAL REVIEW B, 1996, 54 (08) :5914-5919