Macroporous silicon: efficient antireflective layer on crystalline silicon

被引:8
作者
Fonthal, Faruk [1 ,2 ]
Torres, Ivaldo [1 ,2 ]
Rodriguez, Angel [3 ]
机构
[1] Univ Autonoma Occidente, Adv Mat Micro & Nanotechnol Grp, IMAMNT, Dept Automat & Elect, Cali, Colombia
[2] Univ Pamplona, Dept IEEST, LOGOS Grp, Pamplona, Colombia
[3] Univ Politecn Cataluna, Micro & Nanotechnol Grp, Dept Elect Engn, Barcelona 08074, Spain
关键词
MULTICRYSTALLINE SILICON;
D O I
10.1007/s10854-010-0232-6
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A macroporous silicon layer (ma-PS) electrochemically grown on crystalline silicon surface can be used as an efficient antireflective layer in optical devices as antireflection coating. In this work, we presented the ma-PS layers fabricated on crystalline silicon (c-Si) n-type and p (+)-type, obtained by electrochemical etching. The morphology, porosity, thickness of ma-PS layer can be adjusted by controlling the electrochemical formation conditions. The optical behaviour of the antireflective coating over the solar spectrum is determined, resulting in very low values of the normalized reflectivity coefficient (below similar to 1%). The reflectivity measurements were evaluated at 45A degrees in the different samples of the ma-PS/c-Si.
引用
收藏
页码:895 / 900
页数:6
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